MEMS Design and Application


Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization

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A new AlAs/GaAs-based multimorph microactuator (Fig. 1) is designed and modeled for micro-opto-electro-mechanical systems (MOEMS) applications. As the piezoelectric-based III-V materials such as AlAs/GaAs have small piezoelectric constants, we have developed the Simulated Annealing (SA)-based [...]

Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-7-6