Institute of Materials Research & Engineering

Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization

Ongkodjojo A., Tay F.E.H., Akkipeddi R., Institute of Materials Research & Engineering, SG

A new AlAs/GaAs-based multimorph microactuator (Fig. 1) is designed and modeled for micro-opto-electro-mechanical systems (MOEMS) applications. As the piezoelectric-based III-V materials such as AlAs/GaAs have small piezoelectric constants, we have developed the Simulated Annealing (SA)-based [...]

A Low Cost Polymer Based Piezo-Actuated Micropump for Drug Delivery System

Liu H., Tay A.A.O., Wan S.Y.M., Lim G.C., Institute of Materials Research & Engineering, SG

This paper presents the design, realization and simulation of a novel polymer based check-valve micropump actuated by piezoelectric disc. Comparing with silicon substrate, polymer materials have such advantages as flexibility, chemical and biological compatibility, 3D [...]