Practical Techniques for Measuring MEMS Properties

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We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences between the geometry as fabricated and in layout, as well as differences between simulated and actual performance. We validate our electrical measurements using optical tools, and use the measured properties in CAD models to predict the performance of more complex designs.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 402 - 405
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-7-6