MEMS Design and Application

A New Method to Design Pressure Sensor Diaphragm

Wang X., Li B., Lee S., Sun Y., Roman H.T., Chin K., Farmer K.R., New Jersey Institute of Technology, US

Over the last decade, silicon pressure sensors have undergone a significant growth. In most cases, these MEMS (Microelectromechanical System) devices are manufactured from rectangular or circular diaphragms whose thickness is constant and in the order [...]

Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices

Mautner T., SPAWAR Systems Center San Diego, US

This paper describes the lattice Boltzmann, numerical simu-lations used to evaluate a conduction-based, polymerase chain reaction (PCR) device for uniformity of the micro channel temperature profile and its velocity field distribu-tion. For comparison purposes, numerical [...]

Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications

Aggarwal P., Johnston C., University of Calgary, CA

This paper discusses the design and implementation of MEMS microneedle with emphasis on integrated functionality for sensing the forces. The idea is based on the requirements of strength, robustness, and minimal insertion pain and tissue [...]

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process

Lin C.H., Chen H-R, Du C-H, Fang W., National TsingHua University, TW

A 2.45GHz filter is fabricated by thin film bulk acoustic wave resonator (FBAR) technology. Especially, it is designed to minimize die size and to simplify fabrication process simultaneously by using inductive coupling plasma etching. The [...]

A MEMS Tunable Inductor

Zine-El-Abidine I., Okoniewski M., McRory J.G., University of Calgary and TRLabs, CA

This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above [...]

Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications

Kham M.N., Houlihan R., Kraft M., Southampton University, UK

This paper describes the design and simulation of a mechanical amplifier used to improve the performance of a capacitive accelerometer. It comprises a long silicon beam attached to the proof mass and it amplifies the [...]

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fabricated by Multi-Users MEMS Process (MUMPs) with a post-processing bulk etching step. Micromachined actuators have potential applications in microtransducers such as scanning tunneling microscope [...]

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Lomas T., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

This paper discusses the design, fabrication and testing of a 5x5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range). Central contacting pads that are trampoline-shape suspended structures and sensor [...]

Modelling and Fabrication of Microspring Thermal Actuator

Luo J.K., Flewitt A.J., Spearing M., Fleck N.A., Milne W.I., University of Cambridge, UK

A new spring type microelectrothermal actuator with greatly enhanced displacement is proposed. Instead of using a single long chevron actuator, several chevrons are folded into a number of sections to become a spring-like actuator. Insulating [...]

The Application of Parametric Excitation to a Micro-Ring Gyroscope

Gallacher B.J., Burdess J.S., Harris A.J., Hedley J., Insat University of Newcastle, UK

This paper reports on a parametric excitation scheme that separates the drive and response frequencies of a micro-ring gyroscope in the ratio 10:1 approximately, with the aim of minimising electrical "feedthrough". Electrical feedthrough of the [...]

A Nanoscale Composite Material for Enhanced Damage Tolerance in MEMS Applications

Paranjpye A., MacDonald N.C., Beltz G.E., university of california, santa barbara, US

A two-dimensional laminar composite material has been shown to exhibit enhanced damage tolerance due to zones of residual compressive stress. The damage tolerance appears as a threshold stress below which the structure does not fail [...]

Novel Monolithic Micro Droplet Generator

Chung C.K., Lin C.J., Chen C.C., Chuang S.W., Fang Y.J., Hong Y.Z., National Cheng Kung University, TW

A novel monolithic off-shooter droplet generator has been demonstrated. The design, fabrication, bubble formation and droplet injection are described here. It is different from the conventional droplet generators of top-shooter, side-shooter and back-shooter for injection. [...]

A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes

Chaudhary A., van Amerom F.H.W., Bhansali S., Short R.T., University of South Florida, US

This work concentrates on a novel technique for the fabrication of miniaturized cylindrical ion trap structures (CIT) to be used as replacements of commercial hyperbolic structure ion trap mass spectrometers. Low temperature co-fired ceramic (LTCC) [...]

Micromachined III-V Multimorph Actuator Model and Design using Simulated Annealing (SA)-Based Global Optimization

Ongkodjojo A., Tay F.E.H., Akkipeddi R., Institute of Materials Research & Engineering, SG

A new AlAs/GaAs-based multimorph microactuator (Fig. 1) is designed and modeled for micro-opto-electro-mechanical systems (MOEMS) applications. As the piezoelectric-based III-V materials such as AlAs/GaAs have small piezoelectric constants, we have developed the Simulated Annealing (SA)-based [...]

Optimized Distributive u-Mixing by Chaotic Multilamination

Schönfeld F., Drese K.S., Hardt S., Hessel V., Hofmann C., Institut für Mikrotechnik Mainz –(IMM), DE

We present a new type of micro mixer relying on a multi-step split-and-recombine (SAR) approach. Using computational fluid dynamics (CFD), a favourable mixer design is identified which allows for an almost ideal multilamination. The numerical [...]

Analysis of Micromachined PZT Membranes for MEMS Power

Cho J-H., Anderson M.J., Richards C.D., Richards R.F., Bahr D.F., Richards C.D., Richards R.F., Washington State University, US

The need for miniaturized power sources for MEMS and microelectronics devices is widely recognized. Recent work by our team at Washington State University has been directed at the design of a micro heat engine in [...]

Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores

Zhuang Y., Vroubel M., Rejaei B., Burghartz J.N., Delft University of Technology, NL

Integration of magnetic material has been long proposed to potentially improve performance and shrink size of on-chip inductive RF/microwave components, e.g. inductors, transformers, and transmission lines, which is crucial for the development of cost-effective RF/BiCMOS [...]

Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications

Llobera A., Wilke R., Büttgenbach S., Institut für Mikrotechnik, DE

A new robust and compact system, which comprises a PDMS-based hollow Abbe prism and microlenses, together with self-alignment channels for optical fibre positioning, is presented. This optical detection method has two different regimes for signal [...]

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