Papers:
Advancement of Prototyping and Fabrication Techniques for Active Sensors and Microelectronics
U.S. Army ARDEC is developing the ability to custom design and integrate novel technologies into functional systems for the creation and advancement of active systems. This research being performed will directly and indirectly support the [...]
The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm
A novel miniature silicon microphone diaphragm is described that is highly robust when subjected to stresses that may arise during the fabrication process. Residual stress produces major challenges in the fabrication of MEMS devices. This [...]
Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization
We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits [...]
Pneumatically driven Auxiliary Micro Tools for Desktop Factories
This paper presents the design and the fabrication process of two novel pneumatically driven auxiliary micro tools that can be used to improve and to speed up assembling processes in desktop factories. The described micro [...]
Nanocomposite Contact Material for MEMS Switches
This work reports the development of a nanostructured composite contact material for improving the contact reliability of MEMS switches. The nanocomposite material was integrated into a bulk titanium MEMS (BT-MEMS) switch which was fabricated using [...]
Fabrication of Nanostructures on Curved Surfaces Using PDMS Stamp
In this study we report on a simple and effective process that allows direct imprinting of micro- and nanostructures on concave and convex substrates using a flexible stamp and pressurized air . One of the [...]
Deposition of beta-SiC thin films on Si (100) substrates by MOCVD method for NSOM applications
Silicon carbide thin films were deposited on Si(100) substrates by metal-organic chemical vapor deposition(MOCVD) in high vacuum condition(2.010-7 Torr) using 1,3-disilabutane as a single source precursor which contains silicon and carbide in 1:1 ratio at [...]
Design of Multi – Dimensional Variable Capacitors for RF MEMS
Abstract— In this work, a multi dimensional RF MEMS variable capacitor that utilizes electrostatic actuation is designed. Here we preferred Electrostatic actuation due to its low power consumption. The RF MEMS variable capacitor is designed [...]
Dielectrophoresis and Comsol Simulation of Cell Entrapment At Electrodes
Padmaraj D., Zagozdzon-Wosik W., Pande R., Miller J.H., Xie L-M, Wosik J., Zagozdzon-Wosik W., University of Houston, US
Dielectric properties of biological samples change with frequency of the interrogating electric field therefore can be used to obtain information about structures and various kinetic as well as bio-physical and –chemical processes in the cells. [...]
BioMEMS for Mitochondriaa Medicine
Padmaraj D., Zagozdzon-Wosik W., Xie Lei-Ming, Pijanowka D., Miller J.H., Grabiec P., Wosik J., Zagozdzon-Wosik W., University of Houston, US
We designed and fabricated BioMEMS for applications in subcelullar level studies, more specifically for monitoring complementary parameters important in mitochondria medicine.BioMEMS were first simulated using COMSOL 3.4 and then fabricated as an SU-8 based microfluidic [...]
Contactless Micro Position and Angular Sensor Device Based on Micro Structured Polymer Magnets
In this abstract we present a contactless micro position and angular sensor system which consists of fixed commercial magnetic sensors, such as hall sensors and a movable part with integrated micro structured polymer magnets. This [...]
Micro-Fabricated Electrostatic Voltage Sensor with a Thin Bulk-Silicon Device Layer
Micro-fabricated sensors made of a 20 µm thick bulk-silicon device layer for electrostatic voltage measurements are presented. A rotational, seesaw-like actuator with two electrically isolated electrodes on its ends forming parallel-plate capacitors with opposing electrodes [...]
The Study of Mechanical Stress in NEMS Heterostructures
Mechanical stress is increasingly applied in microelectronics. For instance, strained silicon technology is widely used to improve carrier mobility and driver current for advanced MOS transistors. For micro-electromechanical systems, piezoresistive effects are widely used in [...]
Amperometric Detection of Staphylococcal Enterotoxin B in milk using Magnetic Bead-Based Immunoassay on Disposable Screen Printed Carbon Electrode Strip
Rastogi S.K., Gibbon S., Branen A.L., Branen J.R., Branen A.L., Branen J.R., University of Idaho, US
A novel approach for the sensitive detection of Staphylococcal enterotoxin B (SEB) in milk is reported. The method used sandwich enzyme-linked immunoassay with SEB specific antibodies on magnetic beads. A small cylindrical magnet was fixed, [...]
A Multifunctional MWCNT strain sensor: sensing and damping
The goal of this work is to develop a new type of multi-functional mechanical strain sensor using multi-walled carbon nanotube (MWCNT) films. This new sensor is potentially to function as free layer damping treatment for [...]
A Novel Virtual Button User Interface for Determining the Characteristics of an Impulse Input Based on MEMS Inertial Sensors
This paper introduces a novel application of MEMS accelerometer in consumer electronics device for a ‘Virtual Button’ Technology. MEMS based accelerometers is designed in order to measure low-g acceleration to sense tapping motion on the [...]
Microfluidic Platforms with Micro- and Nanopore Membranes and in situ Formation of Lipid Bilayer in the Microfluidic Platform
Artificial lipid bilayer membranes have come into the spotlight as topics of fundamental properties of biomaterials, targets for drug discovery and safety screening, and analytic platforms for characterization and orientation discrimination of polynucleotide molecules. Lipid [...]
Detecting CH4 and CO Gases Using Micro-Structural Doping Compound Oxide Films on Si-Substrates
Fluctuation-enhanced chemical sensing with commercial gas sensors have already been studied[1-4]. Fig. 1 shows one of the typical fluctuation-enhanced signals of PdxWO3 film sensor. The gas-sensing films used in commercial gas sensors are deposited on [...]
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Published: May 3, 2009
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 978-1-4398-1782-7