We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits are electrochemically deposited/dissolved on a Ag-doped GeSe solid electrolyte film on a microphone diaphragm. The growth/retraction of the nano-electrodeposits generates mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3dB Directivity Index (DI) improvement.
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Published: May 3, 2009
Pages: 436 - 439
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications