In this study we report on a simple and effective process that allows direct imprinting of micro- and nanostructures on concave and convex substrates using a flexible stamp and pressurized air . One of the key components for the process is to produce flexible stamps with desired structures that can be conformally molding into curved surfaces. For convex substrate a thin layer of PMMA was spin-coated on glass lens using spin coating while for concave substrate a layer of PMMA was produced using dipping of the substrate into PMMA solution. Conformal molding was performed using pressurized air at 50 bar and 160 °C for 20 minutes. This work will be extended to produce nano-scale patterns on micro-scale curved surfaces and the limitation of this process such as curvature radius of curved substrates and aspect ratio of molded nano-patterns will be discussed.
Journal: TechConnect Briefs
Volume: 1, Nanotechnology 2009: Fabrication, Particles, Characterization, MEMS, Electronics and Photonics
Published: May 3, 2009
Pages: 448 - 451
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications