Papers – Page 35 – TechConnect Briefs

Application of Magnetic Neutral Loop Discharge Plasma in Deep Quartz and Silicon Etching Process for MEMS/NEMS Devices Fabrication

Morikawa Y., Hayashi T., Suu K., Ishikawa M., ULVAC, Inc., JP

ULVAC’s Si deep etching technique has achieved high etching rate as high as 20 um/min as well as extremely high selectivity over resist mask as high as 100 or higher ensuring good etching performance.

Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures

Chen P.S., Chen Y.J., Peng Y.H., Chen P.S., Chen Y.J., Kuan C.H., National Taiwan University, TW

Here we report the ability to fabricate well-aligned and mono-modal Ge dots on the silicon substrate with nano-trenches. It is started with electron beam lithography system (E-beam) to make patterns. Then reactive ion etching (RIE) [...]

Direct Wafer Polishing with 5 nm Diamond

Sung J.C-M, Tai M-F, Kinik Company, TW

CMP for making future semiconductor chips with nanom (nano meter) feature sizes can be accomplished by using nanom diamond particles embedded in an organic matrix (e.g. epoxy). Such nanom diamond particles are derived from the [...]

A Unified Compact Model for Electrostatic Discharge Protection Device Simulation

Chou H-M, Cho Y-Y, Chou H-M, Lee J.W., Li Y., National Chiao Tung University, TW

In modern microelectronics manufacturing, whole chip electrostatic discharge (ESD) protection circuit design is necessary for obtaining robust electrical performance [1-5]. In designing the whole chip ESD protection circuit, owing to its high circuit complexity, an [...]

Diode Laser Welding of Planar Microfluidic Devices, BioMEMS, Diagnostic Chips & Microarrays

Chen J-W, Zybko J., Clements J.T., NanoSciences, Inc., US

As polymer-based microfluidic devices, lab-chips and diagnostic platforms are pushed towards increasingly smaller geometries, advances in diode laser technology now allow for cleaner and more precise assembly. Coupling the use of photolithographic methods and mask-sets [...]

Development of Self-Assembled Robust Microvalves with Electroform Fabricated Nano-Structured Nickel

Li B., Chen Q., University of Central Florida, US

The microvalve for the hydraulic actuatora need large flow rate (>10 cc/second, displacement related), high-pressure support ability (>10 MPa) and a high operational frequency (>10 kHz) [1, 2]. Microvalves can match the piezoelectric material’s frequency, [...]

Pressure Sensor Elements Integrated with CMOS

Kiihamäki J., Vehmas T., Suni T., Häärä A., Ylimaula M., Ruohio J., VTT Information Technology, FI

We report the measurement and fabrication results of monolithically integrated capacitive pressure sensor elements. The device fabrication process is based on novel plug-up process, which enables monolithical integration of sensors and CMOS in a modular [...]

A Gate Layout Technique for Area Reduction in Nano-Wire Circuit Design

Hashempour H., Lombardi F., LTX Corp., US

An strategy for developing integrated circuits with many individual nanodevices has yet to be formulated. This paper presents an homogeneous (array-based) approach for designing and manufacturing digital circuits using nanotubes or nanowires. By targeting contacts [...]

Direct Patterning of Functional Materials via Atmospheric-Pressure Ion Deposition

Hamedinger T.E., Steindl T., Albering J., Rentenberger S., Saf R., Graz University of Technology, AU

Interest in thin films of functional organic materials has increased enormously in the past years because of various possible applications. Here we report an experimental setup for the processing of various organic materials into thin [...]

Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold

Rust M.J., Subramaniam S., Ahn C.H., University of Cincinnati, US

In this abstract, the fabrication of nanochannels using poly (dimethylsiloxane) (PDMS) casting on Si/Ti mold is proposed and results are presented. This work can possibly enable the mass-production of low cost nanochannels to study basic [...]