Papers – Page 29 – TechConnect Briefs

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

Dong Y., Kraft M., University of Southampton, UK

Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]

System Issues in Arrays of Autonomous Intelligent Sensors

Newman R.M., Gaura E.I., Conventry University, UK

This paper considers some of the systems level issues of concerned when building of large scale sensing systems composed of a large number of autonomous intelligent sensors. The work is motivated by the potential offered [...]

Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump

Zhao Y., Li B., Ludlow D., Zhang X., Boston University, US

As part of a program to develop a cooling system for satellite instrumentation capable of working at cryogenic temperature, we present herein pumping capacity and material reliability study on a silicon-based cryogenic micro pump which [...]

Practical Techniques for Measuring MEMS Properties

Clark J.V., Garmire D., Last M., Demmel J., Govindjee S., Berkeley Sensor and Actuator Center, US

We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences [...]

A MOEMS Electrothermal Grating

Furlani E.P., Eastman Kodak Research Labs, US

We present a thermoelastically driven MOEMS light modulator in the form of an ElectroThermal Grating (ETG). The ETG consists of an array of equally spaced bilayer microbeams suspended at both ends above a substrate (Fig. [...]

Device Characterization at the Wafer Level via Optical Actuation and Detection

Hedley J., Burdess J.S., Harris A.J., Gallacher B.J., Newcastle University, UK

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an [...]

Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications

Llobera A., Wilke R., Büttgenbach S., Institut für Mikrotechnik, DE

A new robust and compact system, which comprises a PDMS-based hollow Abbe prism and microlenses, together with self-alignment channels for optical fibre positioning, is presented. This optical detection method has two different regimes for signal [...]

Integrated High Frequency RF Inductors with Nano/micro Patterned Ferromagnetic Cores

Zhuang Y., Vroubel M., Rejaei B., Burghartz J.N., Delft University of Technology, NL

Integration of magnetic material has been long proposed to potentially improve performance and shrink size of on-chip inductive RF/microwave components, e.g. inductors, transformers, and transmission lines, which is crucial for the development of cost-effective RF/BiCMOS [...]

Analysis of Micromachined PZT Membranes for MEMS Power

Cho J-H., Anderson M.J., Richards C.D., Richards R.F., Bahr D.F., Richards C.D., Richards R.F., Washington State University, US

The need for miniaturized power sources for MEMS and microelectronics devices is widely recognized. Recent work by our team at Washington State University has been directed at the design of a micro heat engine in [...]

Optimized Distributive u-Mixing by Chaotic Multilamination

Schönfeld F., Drese K.S., Hardt S., Hessel V., Hofmann C., Institut für Mikrotechnik Mainz –(IMM), DE

We present a new type of micro mixer relying on a multi-step split-and-recombine (SAR) approach. Using computational fluid dynamics (CFD), a favourable mixer design is identified which allows for an almost ideal multilamination. The numerical [...]