Papers – Page 28 – TechConnect Briefs

Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

Le Guilly M., Xu C., Taya M., Kuga Y., University of Washington, US

A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane [...]

Ferrofluid Masking for Lithographic Applications

Yellen B., Friedman G., Drexel University, US

A novel self-aligned “soft masking” method that is compatible with traditional photolithographic processes is demonstrated. This method uses a suspension of ultra-fine iron oxide grains (ferrofluid) to protect or de-protect selected areas of a magnetically [...]

Soft and Probe Lithography without Ink Transfer

Huskens J., Li X., Péter M., Reinhoudt D.N., University of Twente, MESA+ Research Institute, NL

Microcontact printing (mCP) and dip-pen nanolithography (DPN) are versatile techniques for the creation of patterned surfaces. They commonly employ the transfer of an ink (e.g. a thiol) onto a surface (e.g. a gold-coated substrate) thus [...]

Smart, Intelligent and Cogent Microsensors – Intelligence for Sensors and Sensors for Intelligence

Gaura E., Newman R.M., Coventry University, UK

The paper develops a terminology to describe sensors which have been enhanced in some way by the integration of some additional processing circuitry. Several terms, current in the literature, including 'smart sensors' and 'intelligent sensors' [...]

Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor

Daniel M., Szermer M., Janicki M., Napieralski A., DMCS, Technical University of Lodz, PL

Proper CAD design of electronic microsystems oriented for environment monitoring requires accurate models of various sensors, which would be compatible with the existing behavioral simulators. In this paper the analysis of the ion sensitive transistor [...]

Macromodel of Intelligent Sensor Structure with Accelometer

Husak M., Jakovenko J., Kulha P., Novak J., Janicek V., Czech Technical University in Prague, CZ

The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There [...]

Electrostatic Tuning of a Micro-Ring Gyroscope

Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]

Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force

Xiao Z., Sun Y., Li B., Lee S., Sidhu K.S., Chin K.K., Farmer K.R., New Jersey Institute of Technology, US

We have investigated the effect of natural frequency shift in single-crystal silicon, rectangular, electrostatic torsion actuators due to the electrostatic force. The electrostatic actuator was fabricated by using ultra-thin silicon wafer, SU-8 thermal compression bonding, [...]

GEMS: A Revolutionary System for Environmental Monitoring

Manobianco D.M., Manobianco J., Evans R.J., Pister K.S.J., Manobianco D.M., Manobianco J., ENSCO, Inc., US

This paper describes a revolutionary, new observing system designed for environmental monitoring that will integrate MicroElectroMechanicalSystems (MEMS) and nanotechnologies. The concept, known as Global Environmental MEMS Sensors (GEMS), features an integrated system of airborne probes [...]

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching

Morris B.G., May G.S, Georgia Institute of Technology, US

This paper explores a novel technique for monitoring film thickness in reactive ion etching that incorporates a micromachined sensor. The prototype sensor correlates film thickness with the change in resonant frequency that occurs in the [...]