The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There is described approach to the development of functional and system model of the structure. A hardware model has been developed for verification of properties. Model properties have been simulated using simulators of electronic circuits. Basic parts of the hardware model are: accelerometer, microprocessor, interface. The system is temperature-compensated. The values of referential position are set automatically.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 434 - 437
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio