Electrostatic Tuning of a Micro-Ring Gyroscope
Burdess J.S., Gallacher B.J., Harris A.J., Hedley J., King D., Rickard A., Insat University of Newcastle, UK
This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]