Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

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A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane followed by stepwise assembly of Au colloids on the amine surface into a conductive electrode. Patterned gold electrodes can be created by using a stencil mask during allylamine plasma deposition. The influence of the allylamine plasma conditions on the electrode and the subsequent actuator is studied. A Flemion membrane (14m) with a low power plasma allylamine coating and 10 sequential assemblies of Au colloids showed a fast, repeatable actuation at +/-1.5V.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 455 - 458
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Personal & Home Care, Food & Agriculture
ISBN: 0-9728422-7-6