Papers – Page 20 – TechConnect Briefs

Using Topology Derived Masks to Facilitate 3D Design

Schiek R., Schmidt R., Sandia National Laboratories, US

To accelerate MEMS design for surface micromachining applications, an algorithm and associated design tool have been created which translates designers’ 3D models into 2D lithographic production masks. Typically, designing a surface micromachined, MEMS device requires [...]

Dynamic Simulations of a Novel RF MEMS Switch

Younis M.I., Abdel-Rahman E.M., Nayfeh A.H., Virginia Tech, US

We present a dynamic analysis of a novel RF MEMS switch utilizing the dynamic pull-in phenomenon. We study this phenomenon and present guidelines about its mechanism. We propose to utilize this phenomenon to design a [...]

Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness

Juillard J., Baili H., Colinet E., SUPELEC, Department of Measurement, FR

We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less [...]

mor4ansys: Generating Compact Models Directly From ANSYS Models

Rudnyi E.B., Lienemann J., Greiner A., Korvink J.G., IMTEK, Albert Ludwig University, DE

Model reduction of linear large-scale dynamic systems is already quite an established area [1]–[3]. In a number of papers (see references in [3]), the advantages of model reduction have been demonstrated. In the present paper, [...]

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

Juillard J., Cristescu M., Guessab S., SUPELEC, Department of Measurement, FR

We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling [...]

Analytical Model for the Pull-in Time of Low-Q MEMS Devices

Rocha L.A., Cretu E., Wollfenbuttel R.F., Delft University of Technology, NL

A meta-stable transient region just beyond pull-in displacement that ultimately governs the pull-in time in critically damped systems is identified in this paper. Since the pull-in displacement time is basically governed by this second region [...]

A New 3D Model of The Electro-Mechanical Response of Piezoelectric Structures

Elata D., Elka E., Abramovich H., Technion – Israel Institute of Technology, IL

The constitutive equations of multi-layered piezoelectric structures are derived in a new form. In this form, the electromechanical coupling is presented as an additional stiffness matrix. This matrix is a true property of the piezoelectric [...]

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

Atre A., Boedo S., Rochester Institute of Technology, US

Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]

Design and Modeling of a 3D Micromachined Accelerometer

Ghafari S.H., Golnaraghi M.F., Mansour R., University of Waterloo, CA

This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]

A Model for Thermoelastic Damping in Microplates

Nayfeh A.H., Younis M.I., Virginia Tech, US

We present a model and analytical expressions for the quality factors of microplates due to thermoelastic damping. We solve the heat equation for the thermal current across the thickness of a microplate, and hence decouple [...]