Papers – Page 18 – TechConnect Briefs

Model for Flow Resistance of a Rare Gas Accounting for Surface Roughness

Veijola T., Helsinki University of Technology, FI

The contribution of surface roughness is included in the flow resistance of rare gas flow channels. The statistical properties of the surface are taken into account in the model applying a novel approximation for the [...]

Lumped Modeling of Thermal Inkjet Print Head

Lee Y-S, Kim M.S., Shin S., Shin S.J., Shin S., Shin S.J., CSE Center, Samsung Advanced Institute of Technology, KR

A lumped model is developed to improve the design of a thermally driven monolithic inkjet print head. The model is based on a two-dimensional heat conduction equation, an empirical pressure-temperature relation and a hydraulic flow-pressure [...]

Analysis and Verification of Processing Sequences

Hansen U., Triltsch U., Büttgenbach S., Germer C., Franke H-J, Institute for Microtechnology, Braunschweig, DE

In the field of micro technology new technologies are being developed and employed to generate increasingly complex microsystems. Due to this, engineers have to be acquainted with considerable knowledge about the different processing technologies in [...]

MEMulator: A fast and accurate Geometric Modeling, Visualization and Mesh Generation Tool for 3D MEMS Design and Simulation

Udeshi T., Parker E., Zyvex Corporation, US

We present novel voxel-based algorithms and their application to Micro Electro Mechanical System (MEMS) design and simulation. Voxel-based techniques are known for their robustness and flexibility and have been used for MEMS design and simulation. [...]

Algorithmic and Modeling Aspects in the Electro-thermal Simulation of Thermally Operated Microsystems

Rencz M., Székely V., Poppe A., Courtois B., Micred, HU

A new algorithm has been developed for the layout based electro-thermal simulation of integrated circuits and MEMS, using simultaneous iteration. The general advantage of this method over simulator coupling is that, in contrast with the [...]

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

Latorre L., Beroulle V., Nouet P., LIRMM, FR

This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed [...]

Heat Transfer Macromodels for MEMS Devices with 3D Geometries

Yu C-C, Yang Y-J, National Taiwan University, TW

There are numerous heat transfer applications in MEMS, such as thermal actuating, uncooled infrared sensing, chip cooling, temperature sensing, PCR, and so on. Most of the applications need feedback loops for precise control or actuation, [...]

Static and Dynamic Analysis of Silicon NEMS

Tang Z., Aluru N.R., University of Illinois, US

Microelectromechanical systems (MEMS) have already revolutionized many areas including communications, information technology, medical, mechanical and aerospace technologies. Nanoelectromechanical systems (NEMS) are MEMS with submicron critical dimensions. NEMS have the potential to fundamentally change the way [...]

A Systematic Approach to Macromodeling Complex MEMS Devices

Casinovi G., Georgia Tech, US

This paper describes a modeling methodology for arbitrary MEMS devices based on the concept of element stamps. Previously published work has shown that element stamps can be used profitably to build models of MEMS devices [...]

Dynamic Simulation of MEMS Switches using Simulink

Combes D.J., Brunson K.M., John R., Bunyan T., QinetiQ Ltd, UK

A nodal model is implemented in Simulink and used to investigate the dynamics of electrostatically actuated MEMS switches. The model is based on reduced order 4DOF beam elements, with electrostatic forces based on simple parallel [...]