Papers – Page 4 – TechConnect Briefs

Analysis of Anodic Bonding and Packaging Effects in Micro Sensors

Shing T-K, Industrial Technology Research Institute, TW

Anodic bonding is quite popular in making micro-sensors since it can bond sodium-rich glass to silicon or virtually any metals with good adhesion strength in lower temperature. It is well known that this process will [...]

The Effect of Thermal Boundary Conditions and Scaling on Electro-Thermal-Compliant Micro Devices

Mankame N., Ananthasuresh G.K., University of Pennsylvania, US

Electro-thermal micro actuators that operate by virtue of constrained thermal expansion induced by Joule heating, have recently received considerable attention. We use electro-thermal actuation to create monolithic compliant devices with embedded actuation in which the [...]

Simulation for Low Temperature Coefficient Design of Piezoresistive and Hall Sensors

Matsuda K., Kanda Y., Naruto University of Education, JP

Simulation for the temperature coefficient of piezoresistive and Hall sensors is presented. Carrier and ionized impurity concentrations in the n-type silicon gage are calculated from the charge balance equation by applying Newton iteration scheme. The [...]

Modeling and Control of Nanomirrors for EUV Maskless Lithography

Chen Y., Shroff Y., Oldham W.G., University of California, US

The design of mirrors for use in EUV maskless lithography is presented in this paper. We propose a novel nanomirror system with a linear comb actuator, which has favorable stability and performance. A bias voltage [...]

Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact

Chan E.K., Dutton R.W., Stanford University, US

The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed [...]

A Comparison of the Behavioral Characteristics of Miniature Gas Flow Sensors

Cousseau P., Dubochet O., Lerch Ph., Renaud Ph., Swiss Federal Institute of Technology, CH

This paper presents a comparison of three different designs for a miniature gas flow sensor operating on the thermal transfer principle, the standard silicon nitride membrane device and two plastic designs. The goal of this [...]

Computational Studies of Membrane-Based Test Formats

Krishnamoorthy S., Makhijani V.B., Lei M., Giridharan M.G., Tisone T., CFD Research Corporation, US

Membrane-based test formats provide simple, accurate and cost effective diagnoses of acute and chronic conditions in general population health. The sensitivity of the immunoassay is determined by the complex biochemical binding kinetics associated with the [...]

Impact of Microdrops on Solid Surfaces for DNA-Synthesis

Maier C., aus der Wiesche S., Hofer E.P., University of Ulm, DE

The miniaturization of chemical synthesis procedures and their integration in complex microfluidic systems is highly interesting both commercially and scientifically. Here, dosing of microdrops for activation or passivation with high accuracy on a substrate or [...]

Hydrodynamic Force on a Plate Near the Plane Wall

Kim J.H., Kim K.W., Kim M.U., Kim J.H., Kim K.W., Kim M.U., Kim J.H., Kim K.W., Kim M.U., Kwak B.M., KAIST, KR

Hydrodynamic force on a plate moving in a viscous fluid near the plane wall as a model of a microelectromechanical system(MEMS) is considered. The flow field is described by the linearized Navier-Stokes equation. The method [...]

Air-damping Effect on a Micro- and Nano-machined Beam Resonator

Xu G., Zhang C., Jiang Q., University of California, US

The air-damping effect on the resonant frequency and the quality factor of a micro- and nano-machined beam resonator is studied. The beam, placed in a uniform magnetic field, is driven to vibrate transversely by the [...]