Hydrodynamic Force on a Plate Near the Plane Wall

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Hydrodynamic force on a plate moving in a viscous fluid near the plane wall as a model of a microelectromechanical system(MEMS) is considered. The flow field is described by the linearized Navier-Stokes equation. The method of matched asymptotic expansions(MAE) is used, in which the physical domain is subdivided into three regions, interior, edge and outer region respectively. The solution of the Reynolds equation is compensated by so called edge effect. The damping coefficients compared with the experimental results show good consistency.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 583 - 585
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0