The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed beams, and capacitance-voltage measurements of a center- tethered structure that eliminates zipping are shown. A compressible contact surface model is used in 2-D simulations of electrostatically actuated beams to capture the surface effects. The simulation fit is good at low voltages but deteriorates at higher voltages. Substrate curvature and electronic effects are investigated but found to be negligible.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Pages: 598 - 601
Industry sector: Sensors, MEMS, Electronics
Topicss: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications