Papers – Page 3 – TechConnect Briefs

Modelling of Integrated Peltier Elements

Wijngaards D.D.L., Cretu E., Kong S.H., Wolffenbuttel R.F., DIMES ITS/Et, NL

On-chip integration of Peltier devices creates a number of additional parasitics, compared to conventional Peltier devices. The most important are thermal conduction through the supporting membrane and contact resistance. Analytical analysis shows that each parasitic [...]

Simulation and Experimental Verification of Micro Polymerase Chain Reaction Chip

Lin Y-C., Yang C-C., Hwang M-Y., Chang Y-T., Cheng Kung University, TW

This study used finite element analysis to simulate the temperature characteristics of a micro polymerase chain reaction (PCR) chip. The micro-PCR chip was fabricated on a silicon wafer and Pyrex glass using photolithography, wet etching, [...]

Simulation of Heat-Transfer Enhancement Effects in Microreactors

Hardt S., Ehrfeld W., Hessel V., Vanden Bussche K.M., Institut für Mikrotechnik Mainz GmbH, DE

Sate-of-the-art microstructuring techniques allow to model the interface for heat and mass transfer in miniaturized reactions systems on a micrometer scale. In this context, two different approaches for heat transfer enhancement are presented. The ideas [...]

Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool

Briand D., Grétillat M.-A., van der Schoot B., de Rooij N.F., Institute of Microtechnology, CH

In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the [...]

Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements

Nguyen N-T., Huang X., Nanyang Technological University, SG

This paper presents the numerical simulation of a new control method for dynamic micropumps with diffuser/nozzle elements: the pulse-width-modulation (PWM) of the drive signal. A piezo disk with a square wave signal actuates the pump, [...]

Dynamic Analysis of an Electrostatic Micropump

Jiang T.Y., Ng T.Y., Lam K.Y., National University of Singapore, SG

In this paper, a micropump actuated by electrostatic force is dynamically analysed. Mathematical model is established to evaluate the dynamic response of the micropump. Electro-mechanical coupling effect is considered in evaluating the electrostatic force applied [...]

Design and Simulation of A Novel Highly Symmetrical Piezoelectric Triaxial Accelerometer

Li G., Li T., Li Z., Li G., Li T., Li Z., Wang C., Hao Y., Li G., Li T., Li Z., Wu G., Peking University, CN

A monolithic piezoelectric triaxial accelerometer, using a highly symmetric quad-beam structure with a single seismic mass, has been developed. The structure of the accelerometer is analyzed in detail theoretically and numerically. Static and modal simulations [...]

On Design of a Backplate Used in a Hearing Aid

Pedersen N.L., Technical University of Denmark, DK

In this work topology optimization is used to optimize the compliance or the eigenfrequencies of prestressed plates. The prestress is accounted for by including the force equivalent to the prestressing and adding the initial stress [...]

Optimal Design of A Tuning Fork Gyroscope and Its Testing Experiment

Dong Y., Tay F.E.H., Wen Y., Yuan X., Chen W.T., National University of Singapore, SG

The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve [...]

Design of Piezoresistive Silicon Cantilevers with Stress Concentration Regions (SCR) for Scanning Probe Microscopy (SPM) Applications

Gupta A., Bashir R., Neudeck G.W., McElfresh M., Purdue University, US

This paper describes and evaluates the incorporation of novel Stress Concentration Region (SCR) in silicon based cantilevers to enhance piezoresistive displacement, force, and torque sensitivities. In brief, SCR is a region, on the cantilever, with [...]