Papers – Page 3 – TechConnect Briefs

Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model

Salman A., Napieralski A., Jablonski G., Technical University of Lodz, PL

This paper presents a new approach for finding the optimal configuration and geometrical dimensions of very small variable capacitance (VC) side drive micromotors based on a modified parallel plate capacitance model The electrostatic drive torque, [...]

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections

Shkel A., Howe R.T., Horowitz R., University of California-Berkeley, US

This paper studies behavior of non-ideal vibratory micromachined gyroscopes. The use of methods of motion decomposition [1] is the essence of the proposed analytical approach. The method is based on partitioning the equations of motion [...]

Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity

Cretu E., Bartek M., Wolffenbuttel R.F., Delft University of Technology, NL

Results of the analysis and modelling of a pendulum type of accelerometer in an electrostatic field are presented. A common-mode voltage is used to yield an electrostatic positive feedback that amplifies the mechanical sensitivity. The [...]

Oscillating Diaphragms

McEntee J., Bowman L., McEntee Engineering, US

The manufacture of miniature Stirling cycle cryocoolers, using standard micro-machining techniques and materials has been pursued by the authors [1]. A MEMS based cryocooler would allow integration of a cryogenic cooling system directly into a [...]

Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics

Thomas J., Kühnhold R., Schnupp R., Temmel G., Ryssel H., Fraunhofer-Institut fur Integrierte Schaltungen, DE

A novel MEMS vibration sensor for high acceleration am-plitudes was developed in silicon technology for tool state monitoring. According to the application-specific require-ments, the piezoresistive detection of vibration with polysilicon piezoresistors deposited on a thin [...]

Phenomenological Model for Gas Damping of High-Speed Switches

Greywall D.S., Walker J.A., Busch P.A, Arney S.C., Bishop D.J., Boyd G.D., Frigo N.J., Goossen K.W., Iannone P.P., Ruel R.R., Yurke B., Bell Laboratories, Lucent Technologies, Inc., US

This paper discusses a simple phenomenological model of squeeze-film gas damping which has been applied to the design of micromachined optical modulators operating at speeds in excess of 12Mbits/sec. The model is described by analytic [...]

Numerical Simulations of Flat-Walled Diffuser Elements for Valveless Micropumps

Olsson A., Stemme E., Stemme G., Stemme E., Stemme G., Royal Institute of Technology, SE

The flow directing capability of micromachined flat-walled diffuser elements for valve-less micropumps have been investigated. The diffuser element is a small angle flow channel with a rounded inlet and a preferably sharp outlet. The diverging-wall [...]

The Valveless Diffuser Pump-A Numerical Design Study Using MATLAB

Olsson A., Stemme E., Stemme G., Stemme E., Stemme G., Department of Signals, Sensors and Systems, SE

A lumped-mass model is used to improve the design of the valveless diffuser pump. The model is implemented using MATLAB and tested for different previously reported pumps. The flow-pressure characteristics are predicted for different excitation [...]

Characterization of DNA Flow through Microchannels

Shrewsbury P.J., Muller S.J., Liepmann D., University of California-Berkeley, US

Advances in silicon fabrication technology enable the reproduction of laboratory apparatus, and theoretically biochemical processes, on a microscale. The implementation of this technology, however, necessitates additional study as fluid dynamics change at this scale and, [...]

Simulation of Micro-Channel Heat Sinks for Optoelectronic Microsystems

Kreutz E.W., Pirch N., Ebert T., Wester R., Ollier B., Loosen P., Poprawe R., Rheinisch-Westfälische Technische Hochschule Aachen, DE

Water-cooled heat sinks are investigated both experimentally and theoretically as model systems to simulate the energy and mass transport in devices used for cooling of diode lasers. The design of the micro-channel heat sinks yields [...]