Papers – Page 2 – TechConnect Briefs

Opto-Electro-Mechanical model for MOEMS

Benyattou T., Gaffiot F., Jacquemod G., Laine J-P, Leclercq J-L, Ledantec R., Rojo-Romeo P, Seassal C., Spisser A., Viktorovitch P., Vuorinen K., Ecole Centrale de Lyon, FR

A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The [...]

Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application

Mohamed A.Z., Zaki A.M., Electronics Research Inst., EG

The work on this paper focuses on the design of high accuracy and high performance of positioning tracking controller of th. Hybrid stepper system (HSM). realized for the application of direct drive robot (DDR). The [...]

Robust Design of Silicon Piezoresistive Pressure Sensors

Shing T-K, Industrial Technology Research Institute, TW

In order to analyze silicon piezoresistive pressure sensors, several methods are used to obtain the stress distribution for different sizes and config,urations of square diaphragm type silicon pressure sensors. Furthermore, through integral considerations and thoughtful [...]

Finite Element Analysis of MEMS Diaphragm Valves

Kao I., Yang F., SUNY-Stony Brook, US

Based on simple plate theory, the deflection of MEMS microvalve is studied analytically and numerically. The critical load to initially drive the microvalve is found to be proportional to the pre-deflection of microdiaphragm. The microdiaphragm [...]

Simulation of Silicon Piezoresistive Sensors

Kanda Y., Matsuda K., Toyo University, JP

The temperature infiuence of the heavy doped silicon piezoresistive sensors is simulated. In this simulation, the density of state functions for impurity band and band edge tail are taken into account for carrier and ionized [...]

Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives

Mukherjee S., Ye W., Cornell University, US

A methodology for solving inverse problems in Microelectromechanical (MEM) systems is proposed in this paper. Design of variable shape electrostatic comb drives (shape motors), in order to obtain desired force profiles, is presented as an [...]

An Integrated Pressure Sensor with High Performance

Kim K.N., Lee B.N., Park H.D., Shin S-M, Korea Electronics Technology Institute, KR

A bipolar integrated pressure sensor had been designed and simulated. The ion-implanted resistors with temperature coeffcient of 1700pm/?C and 4700ppm/?C were used for calibration and temperature compensation. Ion-implanted resistors are simultaneouslv fabricated with base and [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Eaton W.P., LaVigne G.F., Miller S.L., Rodgers M.S., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]

Load-Deflection of a Low-Stress SiN-Membrane/Si-Frame Composite Diaphragm

Bartek M., Correia J.H., Wolffenbuttel R.F., Delft University of Technology, NL

Finite-Element-Methods (FEM) has been used to study the behavior of a non-planar composite diaphragm, which is to be used in a tunable Fabry-Perot-based silicon microinterferometer. The composite (Ag-mirrorAow-stress SiN membrane/Si-frame) diaphragm used exhibits: excellent flatness, [...]

On the Vibrations of a MEMS Gyroscope

Davis W.O., Pisano A.P., UC-Berkeley, US

In this paper, the dynamics of a dual-axis MEMS gyroscope are examined. The model for the device is based on a non-linear rod theory developed by A. E. Green, P. M. Naghdi and several co-workers. [...]