Finite Element Analysis of MEMS Diaphragm Valves

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Based on simple plate theory, the deflection of MEMS microvalve is studied analytically and numerically. The critical load to initially drive the microvalve is found to be proportional to the pre-deflection of microdiaphragm. The microdiaphragm becomes stiffer when either central pedestal or the diaphragm thickness increases. These decrease the deformation ability of the microdiaphragm, which in turn reduce the possibility of in-use stiction. The finite element results show that stress concentration around the corner of the central pedestal and the step occurs, which may result in local mechanical failure and influence the lifetime of the microsystems.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 591 - 596
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-96661-35-0-3