Opto-Electro-Mechanical model for MOEMS

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A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The minimum resonance Full Width at Half Maximum (FWHM), as measured by micro-reflecffvity experiments, is close to 0.4 nm (around 1.55 1lm) and the continuous tuning range is around 60 nm for a bias voltage of 14 V. In order to study the global characterisffcs of this device, an opto-electro-mechanical behavioral model has been developed. The model, written in VHDL-AMS-like Hardware Description Language, allows a combined simulaffon of opffcal, electrical and mechanical behavior of the tunable opffcal filter in a mixedsignal electronics design framework. Moreover, the use of Hardware Descripffon Language allows an integration of the model in a system simulation context.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Pages: 608 - 613
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Photonic Materials & Devices
ISBN: 0-96661-35-0-3