Modeling & Simulation of Microsystems – Page 65

Model Based Identification as a New Tool to Extract Physical Parameters of Microactuators from Measurements with Error Bounds

Rembe C., Hofer E.P., Tibken B., University of Ulm, DE

Model based evaluation of high speed cinematographic image sequences is demonstrated for a microrelay which was manufactured using the LIGA technology. The measurements of the microrelay have been performed with an experimental setup based on [...]

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices

Nguyen L., Lee H.J., Maher M.A., von Sosen H., Tanner Research, Inc., US

A Methodology for System Level Simulation, Modeling and Optimization of MEMS Devices Categories: Co-simulation and Optimization System, Multi-level Modeling Linh Nguyen, Hee Jung Lee, Mary Ann Maher, and Harald von Sosen Tanner Research, Inc. VLSI [...]

Electro-Mechanical Transducer for MEMS Analysis in ANSYS

Gyimesi M., Ostergaard D., ANSYS, Inc., US

The paper introduces an electro-mechanical transducer finite element (EMT) for the strongly coupled simulation of micro electro-mechanical system (MEMS) devices in the commercial finite element analysis (FEA) package ANSYS.

Analytical Modeling of Beam Behavior Under Different Actuations

Sarraute E., Dufour I., URA CNRS 1375, FR

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with current, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the [...]

A Model of Photoelectric Phenomena in MOS Structures at Low Electric Fields

Przewlocki H.M., Institute of Electron Technology, PL

This paper presents a new model of photoelectric phenomena taking place in MOS structures at low electric fields in the dielectric. Solutions of models equations are analyzed and discussed. Using these equations various photoelectric characteristics [...]

Relaxation-based Circuit Simulation for Large-scale Circuits with Lossy Transmission Lines

Chen C-J., Chinese Culture University, TW

This paper integrates a time-domain transmission line calculation method and relaxation-based circuit dimulation algoright, and investigates the transient response simulation of large-scale circuits with transmission lines. Experimental results have been provided to justify the performance [...]

Circuit Simulation of Quantum Well Bistable Laser Diodes

Madhan M.G., Vaya P.R., Gunasekaran N., Anna University, IN

A large signal electrical equivalent circuit for the multi quantum well bistable laser diode has been developed from the rate equations. The dc and transient analysis are carried out using PSPICE circuit simulator. It is [...]

Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit

Oms-Elisabelar F., Bergaud C., Nicu L., Martinez A., CNRS, FR

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The [...]

A Neural Network Approach for the Identification of Micromachined Accelerometers

Gaura E.I., Steele N., Rider R.J., Coventry University, UK

The paper presents the identification procedure for a nonlinear accelerometer using a neural network. Simulation results obtained in SPICE and Matlab show good agreement between the behaviour of the sensor over its entire working range [...]

High-Fidelity and Behavioral Simulation of Air Damping in MEMS

Turowski M., Chen Z., Prezekwas A., CFD Research Corporation, US

The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipation, using different level models: 3D numerical solution of Navier-Stokes equations (using CFD-ACE from CFDRC), and circuit/behavioral model (in SPICE and Saber/MAST [...]