Efficient Simulation of MEMS Using Element Stamps


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This paper describes an approach to MEMS simulation based on so-called element stamps, which are the building blocks of conventional circuit simulators. Stamps are derived from lumped-constant models of individual electromechanical devices, and built into the simulator. When a system is simulated, the equations describing its behavior can be built and solved in a systematic and efficient way using the stamps of its constitutive elements. This makes the simulation faster and more efficient, compared to simulators that rely on models written in hardware description languages. Numerical results obtained from the simulation of a simple electromechanical system containing a linear comb-drive accelerometer are presented.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 112 - 115
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4