MEMS & NEMS Devices, Modeling & Applications – Page 20

Using MEMS as Self-Calibrating Force-Displacement Transducers: A Computational Study

Clark J.V., Li F., Lee H., Kadasia K., Purdue University, US

Accurate and precise measurements of forces and displacements are critical to the improved understanding, discovery, and prediction of micro- and nanoscale phenomena. Since geometric and material properties of MEMS vary from run to run, it [...]

Development of Surface-micromachined Binary Logic Gate for Low Frequncy Signal Processing in MEMS based Sensor Applications

Chakraborty S., Bhattacharyya T.K., Indian Institute of Technology (IIT), Kharagpur, IN

This paper presents in brief the design, analysis and fabrication of surface micro-machined cantilever based binary logic inverter and universal gate for low frequency signal processing circuits in MEMS based sensors. The paper attempts to [...]

A current controlled plasma-on-a-chip for atmospheric plasma generation

Park H., Jeong J., Kim Y., Hongik University, KR

We present a plasma-on-a-chip operated in a current controlled bias scheme for atmospheric plasma generation. The plasma-on-a-chip was fabricated using micromachining techniques and includes an array of vertically formed micro gaps between an anode and [...]

Design and Control of a Zero Voltage Switching MEMS DC-DC Power Converter

Ghandour S., Despesse G., Basrour S., CEA-LETI, FR

In this paper, we present the modelling, the design, and the control of a DC-DC voltage converter using a MEMS variable capacitor. We estimate, for a 12V-10V step-down converter, an efficiency of 88% and a [...]

Preparation of functional PZT films on 6” and 8” silicon wafers by high rate sputtering

Dudde R., Kaden D., Quenzer H.-J., Wagner B., Fraunhofer ISIT, DE

Crack and void free polycrystalline PZT films in the range of 2 µm to 6 µm have been successfully deposited on silicon wafers using a novel high rate gas flow sputtering process. The development of [...]

Investigation of Stress in AlN Thin Films for Piezoelectric MEMS

Sah R.E., Kirste L., Baeumler M., Hiesinger P., Cimalla V., Lebedev V., Baumann H., Fraunhofer Institute for Applied Solid State Physics, DE

Wurtzite type AlN thin films have recently become of great interest in microelectromechanical system (MEMS) and nanoelectromechanical system (NEMS) for sensing applications such as chemical and biological sensing, electrometry, and scanning probe techniques. As-grown films [...]

Gentle Micropump based on Microelectromagnetic Actuator

Al-Halhouli A.T., Waldschik A., Kilani M.I., Büttgenbach S., Technische Universität Braunschweig, DE

This work presents the fabrication and development of a new multifunction micropump based on integrated electromagnetic microactuator. The novel design consists of a fluidic chip, two microfabricated polymer magnets and chip cover. These components form [...]

One-chip MOS Structure for Temperature Flow Sensor

Husak M., Boura A., Jakovenko J., Czech Technical University in Prague, CZ

There is presented a one-chip MOS structure of anemometric sensor system in the paper. The geometric arrangement of temperature sensors allows measurement of temperature gradient. Temperature gradient allows computation of direction of air flow over [...]

Design of compact, high capacitance ratio MEMS switch for X – Band applications using high-k dielectric materials

Maninder K., CEERI, IN

This paper presents the design optimization of Symmetric Toggle RF MEMS Switch (STS). STS is based on 50 ohm CPW configuration with torsion springs of movable membrane anchored to the ground planes of CPW. The [...]

A MEMS-Based Wide-Band Multi-State Power Attenuator for Radio Frequency and Microwave Applications

Iannacci J., Faes A., Mastri F., Masotti D., Rizzoli V., Fondazione Bruno Kessler - FBK, IT

We propose the implementation of a widely reconfigurable broad-band power attenuator for Radio Frequency (RF) and Microwave signals, entirely based on the RF-MEMS surface micromachining technology available at FBK in Italy. The network realizes a [...]