MEMS & NEMS Devices, Modeling & Applications – Page 19

Integration Approaches of Combining Micro and Nano Technologies

Rouzaud A., Robert Ph., Polizzi J.-Ph., Sillon N., LETI, FR

With an always growing penetration in different mass markets, MEMS are now facing a maturity period, with high constraints for manufacturing simplification and processes standardization in order to lower both costs and time-to-market. In light [...]

MEMS & NEMS Fabrication, Devices & Applications

Design and Fabrication of the Sensor for Measuring the Human Bladder Volume

Lee S., Jun S., Kim S., Kim S., Choi B., Sogang University, KR

This paper presents the result of study on the development of a bladder volume sensor. Previous studies focus on the development of an inner bladder pressure sensor. But there are some difficulties about the measurement [...]

Nano-porous poly-silicon gated ion selective field effect transistors

Zehfroosh N., Shahmohammdi M., Mohajerzadeh S., University of Tehran, IR

We report the realization of ultra high sensitivity ion-selective field effect transistors (ISFET) devices by means of a nano-porous silicon structures placed on the gate region. Thanks to the presence of a nano-porous polysilicon film [...]

A Fully Symmetric and Completly Decoupled MEMS-SOI Gyroscope

Sharaf A., Sedky S., Serry M., Elshurafa A., Ashour M., Habib S.E.-D., American University in Cairo, EG

Gyroscopes are sensors that measure rotation rate and are extremely important in many applications such as navigation and vehicle stability control. Despite being manufactured in many technologies in various shapes and sizes, micro-electromechanical (MEMS) gyroscopes [...]

Flexible Micropost Arrays For Studying Traction Forces Of Vascular Smooth Muscle Cells

Cheng Q., Sun Z., Meininger G.A., Almasri M., University of Missouri, US

This paper describes the design, modeling, fabrication and characterization of micromachined arrays of high density 3-dimensional microposts fabricated using flexible silicone elastomers for studying traction forces generated by vascular smooth muscle cell. It also reports [...]

Individually addressable Cantilever Arrays for Parallel Atomic Force Microscopy

Sulzbach T., Engl W., Maier R., Nanoworld Services GmbH, DE

Cantilever arrays probes with self-sensing and self-actuating cantilevers and integrated sharp silicon tips for parallel surface scanning were realized. Each cantilever is equipped with a piezoresistive deflection sensor and a thermal bimorph actuator enabling an [...]

Topic: MEMS & NEMS Devices, Modeling & Applications