Sensors, MEMS, Electronics – Page 356

Modeling and Analysis of Hysteresis Phenomena in Electrostatic Zipper Actuators

Guidotti P., Bernstein D., California Institute of Technology, US

We investigate the relationship between the pull-in phenomenon for electrostatic actuators and the hysteresis effect found in zipper actuators. Liked lumped mass and spring and tension based membrane models, we show that a beam model [...]

Vibration Analysis of Quartz Yaw-Rate Sensor to Reduce Mechanical Coupling

Fujiyoishi M., Nononmura Y., Omura Y., Tsukada K., Matsushige S., Kurata N., Toyota Central R&D Labs, JP

For a yaw-rate sensor (gyroscope), the reduction of mechanical coupling phenomenon is a key technology for achieving high performance. We analyze the phenomenon with a combination of two models, (1) a static model of a [...]

Thermal Frequency Drift of Resonant Microsensor

Shen F., Lu P., O'Shea S.J., Lee K.H., Pradhan S.C., Ng T.Y., Institute for High Performance Computing, SG

Thermal effects on the resonant frequency drift of a microsensor (a silicon cantilever beam with a gold coating) are studied. Two cases are investigated using analytical methods: uniform temperature distribution and linear temperature distribution along [...]

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Multiple Solutions in Electrostatic MEMS

Pelesko J.A., Georgia Institute of Technology, US

The pull-in voltage instability is the principle phenomena limiting the design of nearly every electrostatically actuated MEMS device. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer [...]

Modeling a High Power Density MEMS Magnetic Induction Machine

Köser H., Lang J.H., Massachusetts Institute of Technology, US

Most micro-scale electric and magnetic machines studied in the last decade lack the power density to support many practical applications. The magnetic induction machine reported here attempts to transcend this practicality barrier by offering power [...]

Simulation of Shape Memory Devices with Coupled Finite Element Programs

Krevet B., Kohl M., Forschungszentrum Karlsruhe, DE

This paper presents thermal and mechanical calculations on micro devices driven by electrical heating of a shape memory alloy (SMA). For simulation a program packages has been developed to allow coupling of single task Finite [...]

Performance Limits of Micromachined Tunable-Cavity Filter

Moon J-S., Shkel A., University of California Irvine, US

This paper focuses on the performance limits of a tunable-cavity Fabry-Perot filter (FPF)implemented using MEMS technology.This is a versatile device capable of many functions,including light modulation and high precision sensing.Our goal is to explore challenges [...]

Coupled Electrostatic-Structures-Fluidic Analysis of a Micromirror

Turowski M., Chan E., Dionne P., CFD Research Corporation, US

For micromirrors used in optical MEMS, in addition to the static displacement-voltage characteristics, the accurate transient characterization of these devices is becoming increasingly important. The latter one is strongly affected by the viscous damping

Nonlinear Mechanics of Suspension Beams for a Micromachined Gyroscope

Davis W.O., Pisano A.P., University of California-Berkeley, US

We present a method for the calculation of the coefficients of cubic stiffening for tether-suspended micromachined systems. The analysis is based on a nonlinear rod theory, and enables the prediction of the maximum achievable motion [...]