Sensors, MEMS, Electronics – Page 254

Multi-Scale Computational Framework: Theoretical approach and application for the growth of carbon nanotubes

Vasenkov A.V., Fedoseyev A.I., Kolobov V.I., Hong Ki-Ha, Choi H.S., Kim J., Kim K.H., Kim J., Kim K.H., Lee H.S., Shin J-K, CFD Research Corporation, US

The current rapid development of nanotechnology has created a significant interest to predict the behavior of materials from the atomic to the engineering scales. However, it was found that such prediction is a very challenging [...]

Modeling of Germanium/Silicon Interdiffusion in Silicon/Silicon Germanium/Silicon Single Quantum Well Structures

Hasanuzzaman M., Haddara Y.M., McMaster University, CA

Intermixing at heterointerfaces and the broadening of the SiGe layer in a Si/SiGe/Si single quantum well (SQW) structure can be detrimental to device performance. Thus it is important to develop predictive models for interdiffusion phenomena [...]

Kinetic Monte Carlo Simulation of Defect-Mediated Organization in Quantum Dot Self-Assembly

Gao D., Kaczynski A., Jaszczak J.A., Michigan Technological University, US

A good understanding of quantum dot (QD) self assembly not only has the potential to augment standard materials patterning technologies but also has applications in industrial nanostructure fabrications. Many observations and insights about self-assembled quantum [...]

Nanoscale Device and Process Modeling

Microfabrication of 3D Structures Using Novel Thermoplastic Elastomers

Sudarsan A.P., Wang J., Ugaz V.M., Texas A&M University, US

We demonstrate the use of novel thermoplastic elastomers synthesized by dissolving readily available polystyrene–(polyethylene/ polybutylene)–polystyrene (SBS/SEBS) triblock copolymers (e.g., Kraton™ G series) in hydrocarbon oils for which the ethylene/butylene midblocks are selectively miscible. The insoluble [...]

Metal-oxide Nanowires for Toxic Gas Detection

Devineni D.P., Stormo S., Kempf W., Schenkel J., Behanan R., Lea S., Galipeau D.W., South Dakota State University, US

The objective of this work was to determine the feasibility of using EFEO to fabricate indium-oxide nanowires that could be used for sensing NO2 and O3. The effects of fabrication parameters such as indium film [...]

Fabrication of Silicon Nanowires Using Atomic Layer Deposition

Gopireddy D., Takoudis C.G., Gamota D., Zhang J., Brazis P.W., University of Illinois at Chicago, US

We will present the synthesis of silicon nanowires using Atomic Layer Deposition (ALD) technique. ALD allows the growth of nanowires in a controlled fashion using the nanoparticles as the seed. The diameter and the length [...]

Absolute Pressure Measurement using 3D-MEMS Technology

Russell R., Meriheinä U., VTI Technologies, US

The use of 3D-MEMS processes has created yet another new breakthrough. Extremely small silicon capacitive absolute pressure sensors can now be realized by utilizing the same MEMS technology that has been in production for many [...]

A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers

Cooper A.W., Docker P.T., Ward M.C., The University of Birmingham, UK

This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator [...]

Microfabricated Silicon Apertures for Ion Channel Measurement

Wilk S.J., Goryll M., Petrossian L., Laws G.M., Goodnick S.M., Thornton T.J., Saraniti M., Tang J.M., Eisenberg R.S., Arizona State University, US

Ion channels are proteins that act as pores in cell membranes and allow only specific ions to pass through the cell wall. Here, we present a method for microfabrication of apertures in a silicon substrate [...]