Sensors, MEMS, Electronics – Page 156

Modeling and Design of Electrostatic Voltage Sensors Based on Micromachined Torsional Actuators

Dittmer A., Dittmer J., Dittmer A., Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

The optimization of design parameters and methods for electrostatic voltage sensors based on torsional actuators is presented. The analytical software model used for this optimization process is discussed and compared to measurement results. Voltage excitation [...]

The static behavior of RF MEMS capacitive switches in contact

Suy H.M.R., Herfst R.W., Steeneken P.G., Stulemeijer J., Bielen J.A., NXP Semiconductors Research, NL

A method is presented in which surface topography characterization is combined with the electrical measurement of the contact mechanics under electrostatic loading. Contact characteristics such as the surface separation versus the applied pressure, and the [...]

Bulk-Titanium Waveguide – a New Building Block for Microwave Planar Circuits

Huang X.T., Todd S., Ding C., MacDonald N.C., University of California at Santa Barbara, US

We present a new topology for planar microwave transmission line: bulk titanium waveguide. The waveguide is formed by deep trench etching, dielectric gap filling, and planarization. The high aspect ratio of the resulting structure provide [...]

Towards an efficient multidisciplinary system-level framework for designing and modeling complex engineered microsystems

Clark J.V., Zeng Y., Jha P., Purdue University, US

We present advances in designing and modeling complex microsystems at the network/system-level. For design, we develop a graphical user interface that allows users to quickly configure complex systems in 3D using a computer mouse or [...]

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

Khalilyulin R., Schrag G., Wachutka G., Münich University of Technology, DE

We present a high-level model of a dual gimbaled mass gyroscope, which provides an accurate physical description of the impact of external and internal disturbances on the output signal, but which also allows for the [...]

High-Stability Numerical Algorithm for the Simulation of Deformable Electrostatic MEMS Devices

Rottenberg X., Nauwelaers B., De Raedt W., Elata D., IMEC, BE

This paper presents a novel high-stability algorithm for the simulation of the electromechanical actuation of electrostatic MEMS devices. Its stability improves on that of voltage- and charge-drive algorithms. It further offers a purely electrical simulation [...]

Sector: Sensors, MEMS, Electronics

Modeling and Design of Electrostatic Voltage Sensors Based on Micromachined Torsional Actuators

The static behavior of RF MEMS capacitive switches in contact

Bulk-Titanium Waveguide – a New Building Block for Microwave Planar Circuits

Towards an efficient multidisciplinary system-level framework for designing and modeling complex engineered microsystems

Physically-Based High-Level System Model of a MEMS-Gyroscope for the Efficient Design of Control Algorithms

High-Stability Numerical Algorithm for the Simulation of Deformable Electrostatic MEMS Devices

Fast Methods for Particle Dynamics in Dielectrophoretic and Oscillatory Flow Biochips

Modeling & Simulation of Microsystems

Non traditional dicing of MEMS devices

Fabrication of nanoscale nozzle for electrostatic field induced inkjet head and test of drop-on-demand operation