Advanced Materials & Manufacturing – Page 605

Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition

Milani P., Barborini E., Piseri P., Iannotta S., Siciliano P., Universita' di Milano, IT

Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch [...]

Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

Le Guilly M., Xu C., Taya M., Kuga Y., University of Washington, US

A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane [...]

Ferrofluid Masking for Lithographic Applications

Yellen B., Friedman G., Drexel University, US

A novel self-aligned “soft masking” method that is compatible with traditional photolithographic processes is demonstrated. This method uses a suspension of ultra-fine iron oxide grains (ferrofluid) to protect or de-protect selected areas of a magnetically [...]

Soft and Probe Lithography without Ink Transfer

Huskens J., Li X., Péter M., Reinhoudt D.N., University of Twente, MESA+ Research Institute, NL

Microcontact printing (mCP) and dip-pen nanolithography (DPN) are versatile techniques for the creation of patterned surfaces. They commonly employ the transfer of an ink (e.g. a thiol) onto a surface (e.g. a gold-coated substrate) thus [...]

Micro and Nano Structuring and Assembly

Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump

Zhao Y., Li B., Ludlow D., Zhang X., Boston University, US

As part of a program to develop a cooling system for satellite instrumentation capable of working at cryogenic temperature, we present herein pumping capacity and material reliability study on a silicon-based cryogenic micro pump which [...]

Practical Techniques for Measuring MEMS Properties

Clark J.V., Garmire D., Last M., Demmel J., Govindjee S., Berkeley Sensor and Actuator Center, US

We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences [...]

A MOEMS Electrothermal Grating

Furlani E.P., Eastman Kodak Research Labs, US

We present a thermoelastically driven MOEMS light modulator in the form of an ElectroThermal Grating (ETG). The ETG consists of an array of equally spaced bilayer microbeams suspended at both ends above a substrate (Fig. [...]

Device Characterization at the Wafer Level via Optical Actuation and Detection

Hedley J., Burdess J.S., Harris A.J., Gallacher B.J., Newcastle University, UK

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an [...]

Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications

Llobera A., Wilke R., Büttgenbach S., Institut für Mikrotechnik, DE

A new robust and compact system, which comprises a PDMS-based hollow Abbe prism and microlenses, together with self-alignment channels for optical fibre positioning, is presented. This optical detection method has two different regimes for signal [...]