Micro and Nano Structuring and Assembly

Papers:

Soft and Probe Lithography without Ink Transfer

Huskens J., Li X., Péter M., Reinhoudt D.N., University of Twente, MESA+ Research Institute, NL

Microcontact printing (mCP) and dip-pen nanolithography (DPN) are versatile techniques for the creation of patterned surfaces. They commonly employ the transfer of an ink (e.g. a thiol) onto a surface (e.g. a gold-coated substrate) thus [...]

Ferrofluid Masking for Lithographic Applications

Yellen B., Friedman G., Drexel University, US

A novel self-aligned “soft masking” method that is compatible with traditional photolithographic processes is demonstrated. This method uses a suspension of ultra-fine iron oxide grains (ferrofluid) to protect or de-protect selected areas of a magnetically [...]

Micro Actuator Array based on Ionic Polymer with Patterned Self-Assembled Au Electrode

Le Guilly M., Xu C., Taya M., Kuga Y., University of Washington, US

A new fabrication technique is proposed to create electrodes on thin ionic polymer membranes for micro actuator applications. The technique consists in plasma deposition of a thin (a few nm) allylamine coating on the membrane [...]

Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition

Milani P., Barborini E., Piseri P., Iannotta S., Siciliano P., Universita' di Milano, IT

Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch [...]

Direct Scanning Laser Writing of 3D Multilayer Microstructures

Yu H., Li B., Zhang X., Boston University, US

Material processing with lasers is an expanding field since it not only makes manufacturing cheaper, faster, cleaner, and more accurate but also opens up entirely new technologies and manufacturing methods that are simply not available [...]

Bottom-Up meets Top-Down – A Novel Approach towards 3-D Optical Devices

Houbertz R., Cochet S., Domann G., Popall M., Serbin J., Ovsianikov A., Chichkov B.N., Fraunhofer ISC, DE

Inorganic-organic hybrid polymers suitable for optical applications, were synthesized by catalytically controlled hydrolysis/polycondensation reactions. The resulting resins are build-up by organically functionalized nm-size primary particles (oligomers). Due to the variety of alkoxysilanes and synthesis parameters, [...]

A Novel Method for Determining Optimum Etch Times for the One Step Dry Release Proces

Docker P.T., Kinnell P.K., Ward M.C., The University of Birmingham, UK

This paper details a novel method for determining the optimum etch times for releasing structures when using the authors one step dry release process. By using self releasing structures known as waffles the exact point [...]

Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Personal & Home Care, Food & Agriculture
ISBN: 0-9728422-7-6