Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition

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Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch on microplatform arrays by using stencil masks. Since the material retains the memory of the precursor clusters, it is possible, by thermal annealing, to prepare arrays with elements characterized by different crystalline phase, grain size and porosity. This allows a novel combinatorial approach to the large-scale fabrication of multi-element micro- and nanosensing devices.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Pages: 459 - 460
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: Personal & Home Care, Food & Agriculture
ISBN: 0-9728422-7-6