TechConnect Proceedings Papers
A Highly Reliable Pattern Transfer of Hydrogen Silsequioxane
Liu J.F., Chen H.J.H., Chen S.Z., Chen H.J.H., Chen S.Z., Huang F.S., National Tsing Hua University, TW
In this paper, we focus on the effects of process parameters on pattern embossing into HSQ films, and the pattern degradation of HSQ for room temperature aging effects. The dilution of HSQ affects not only [...]