Huang F.S. – TechConnect Briefs

The Effect of Growth Temperature on Aluminum Nanocrystal Embedded AlOxNy for Non-Volatile Memory

Chen N.H., Hsieh P-H, Huang F.S., Huang S-J, Huang F.S., Huang S-J, National Tsing Hua University, TW

The aim of this paper is to present a aluminum-based nonvolatile memory of Al2O3 (28 nm)/ Al-rich Al0.54O0.42N0.04 (22 nm)/ Al0.44O0.38N0.18 (3 nm) layered structure on SiO2 (2 nm)/ n-Si by a simple rapid thermal [...]

10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint

Chen H.J.H., Chen N.H., Chen H.J.H., Chen N.H., Lin C.H., Huang F.S., National Tsing Hua University, TW

Surface acoustic wave (SAW) devices have been widely implemented for wireless communications. Recently, SAW devices continue the upward trend in frequency for higher functionality. Nanoimpirnt can adequately offer mass production technique on interdigital transducer (IDT) [...]

The Study of the Nanocontact Imprint with Aminosilane

Shen F.Y., Chen J.H., Chen N.H., Lam K.Y., Chen J.H., Chen N.H., Huang F.S., National Tsing Hua University, TW

The purpose of this paper is to develop nano-contact imprint technology with simple process by using soft HSQ (hydrogen silsesquioxane) mold transfer aminosilane ink on HSQ and glass substrates with binding Glutraic dialdehyde (GA) and [...]

A Highly Reliable Pattern Transfer of Hydrogen Silsequioxane

Liu J.F., Chen H.J.H., Chen S.Z., Chen H.J.H., Chen S.Z., Huang F.S., National Tsing Hua University, TW

In this paper, we focus on the effects of process parameters on pattern embossing into HSQ films, and the pattern degradation of HSQ for room temperature aging effects. The dilution of HSQ affects not only [...]

Au Nano-Wire Transferring onto HSQ by Nano Imprinting Technology

Liu J.F., Hsu Y.J., Chen J.H., Chen S.Z., Huang F.S., Chen J.H., Chen S.Z., National Tsing Hua University, TW

In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable [...]