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Compact Electromagnetic XY Stage with Nano Scale Resolution and Vibration Resistance

Lee K-I., Kim S-H, Cho J-W, Choi Y.J., Shin J-K, Yoo J.C., Choi Y.J., Korea Electronics Technology Institute, KR
The design, fabrication, and the measurement results of an electromagnetic XY stage are presented. The device has an anti vibration structure and shows a high fill factor of 45% due to its unique structure. Furthermore, [...]

Simulation of ac-electroosmotic flows for concentration of particles on biosensors

Tanguy L., Casalis G., Nicu L., LAAS/CNRS, FR
Artificial concentration of particles in a fluid is a major challenge for micro- and nanobiosensors to enhance sensitivity and to reduce the time of response. We present here a numerical simulation of electroosmotic flows for [...]

On the stability length of fluid/liquid interfaces sustained by microfabricated pillars

Berthier J., Man Tran Van, Jeanson H., Sarrut N., CEA-LETI, FR
We focus here on the transfer and concentration of macromolecules from a flowing carrier fluid to a storage liquid. These liquids are flowing in parallel channels, separated by interfaces sustained by micro-pillars. The two fluids [...]

The Logical Elements “And”/ “Or” are Established on the Elements with Punch-Through and Deformation Space Charge Regions

Mats I., Diatex, Selected Texno-Fix, CA
In this article is proposal a design of logical elements “AND”/”OR” based on punch-through effect with a deformation (element ”AND”) of space charge regions (SCR). I.On the substrate N- type is formed P+ - bodies [...]

An Architecture of Quantum CPU

Téllez V., Campero A., Iuga C., Duchen G., Universidad Autónoma Metropolitana, MX
We present a quantum CPU (central processing unit) which is based on the quantum gate set. Using the Von Neuman model, the quantum CPU has development on a classical Digital Signal Processor (DSP TI6711). The [...]

Micro mixture: Size effect of micro mixing

Khelfaoui R., Benyoucef B., Colin S., ASSISTANT, DZ
A micro system is an optimized combination of elements fulfilling several complementary functions. Micro mixers applied in many fields, effective devices, for the handling of a chemical multitude of reaction, achieved objectives along ten years [...]

Characterization and Optimization Design of the Polymer-based Capacitive Micro-arrayed Ultrasonic Transducer

Chiou D.Y., Chen M.Y., Chang M.W., Deng T.M., RFID Technology Center/Industrial Technology Research Institute (RTC/ITRI), TW
The polymer-based capacitive micro-arrayed ultrasonic transducer (P-CMUT) have been shown to be a more attractive alternative to conventional CMUT in terms of “flexibility” that can be applied in many areas, ranging from consumer electronics to [...]

Perturbation Stochastic Finite Element Analysis of Thermoelastic Quality Factor of Micro-Resonators

Lepage S., Golinval J.-C., University of Liege, BE
MEMS are subject to inevitable and inherent uncertainty that leads to variability in their performance. The effects of these variations have to be considered and modeled to ensure required MEMS performance under uncertainties. In the [...]

Analytical and Computational Solutions to Piezoelectric Bending: A Comparative Study

Sabet A., Avula X.J., Washington University in St. Louis, US
Computational and analytical studies are conducted on piezoelectric beams of various materials in bending mode investigating the effect of variations in length and thickness on tip deflection that might be useful in MEMS actuators. Specifically, [...]

Modeling hysteresis and creep characteristics of a carbon-nanotube-reinforced electroactive actuator

Sohn K., Shin S.R., Yi B-J, Kim S.I., Kim S.J., Kim S.I., Kim S.J., Hanyang University, KR
For smart materials that are useful in wide variety of applications such as microelectromechanical systems (MEMS), machine components, and artificial muscle, the nonlinear phenomena of hysteresis and creep are essential consideration. We investigated movement of [...]

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