Papers – Page 1049 – TechConnect Briefs

Towards an Integrated Environment for Modeling and Simulating an Electro-Optic Measurement Microsystem

Barwicz A., Ben Slima M., Wisniewski M.P., Universite du Quebec a Trois-Rivieres, CA

The problem of tools for modeling simulating and testing measurement microsystems is addressed. The design methodology underlying the proposed integrated software & hardware environment for modeling and simulating measurement microsystems is based on functional simulation [...]

Simulation of Grating Light Valves

Furlani E., Eastman Kodak Co., US

The Grating Light Valve (GLV) is a microelectromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In this paper we discuss a method for simulating GLVs. This method entails the solution of [...]

Opto-Electro-Mechanical model for MOEMS

Jacquemod G., Vuorinen K., Gaffiot F., Spisser A., Seassal C., Leclercq J-L, Rojo-Romeo P, Viktorovitch P., Laine J-P, Ledantec R., Benyattou T., Ecole Centrale de Lyon, FR

A highly selective and widely tunable optical filter based on MOEMS technology at 1.55 gm using a Fabry-Perot resonator with micromachined InP-air gap distributed Bragg reflectors has been designed and fabricated in our laboratory. The [...]

Microsteping Control of Hybrid Stepper Motor Using Fuzzy Logic for Robotics Application

Mohamed A.Z., Zaki A.M., Electronics Research Inst., EG

The work on this paper focuses on the design of high accuracy and high performance of positioning tracking controller of th. Hybrid stepper system (HSM). realized for the application of direct drive robot (DDR). The [...]

Robust Design of Silicon Piezoresistive Pressure Sensors

Shing T-K, Industrial Technology Research Institute, TW

In order to analyze silicon piezoresistive pressure sensors, several methods are used to obtain the stress distribution for different sizes and config,urations of square diaphragm type silicon pressure sensors. Furthermore, through integral considerations and thoughtful [...]

Finite Element Analysis of MEMS Diaphragm Valves

Yang F., Kao I., SUNY-Stony Brook, US

Based on simple plate theory, the deflection of MEMS microvalve is studied analytically and numerically. The critical load to initially drive the microvalve is found to be proportional to the pre-deflection of microdiaphragm. The microdiaphragm [...]

Simulation of Silicon Piezoresistive Sensors

Matsuda K., Kanda Y., Toyo University, JP

The temperature infiuence of the heavy doped silicon piezoresistive sensors is simulated. In this simulation, the density of state functions for impurity band and band edge tail are taken into account for carrier and ionized [...]

Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives

Ye W., Mukherjee S., Cornell University, US

A methodology for solving inverse problems in Microelectromechanical (MEM) systems is proposed in this paper. Design of variable shape electrostatic comb drives (shape motors), in order to obtain desired force profiles, is presented as an [...]

An Integrated Pressure Sensor with High Performance

Lee B.N., Kim K.N., Park H.D., Shin S-M, Korea Electronics Technology Institute, KR

A bipolar integrated pressure sensor had been designed and simulated. The ion-implanted resistors with temperature coeffcient of 1700pm/?C and 4700ppm/?C were used for calibration and temperature compensation. Ion-implanted resistors are simultaneouslv fabricated with base and [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Miller S.L., LaVigne G.F., Rodgers M.S., Eaton W.P., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]