MEMS – Page 26 – TechConnect Briefs

Optimal Design of a MEMS Relay Switch

Brenner M.P., Lang J., Li J., Qiu J., Slocum A., Harvard University, US

We describe a novel methodology for predicting optimal designs for microelectromechanical devices. The methods are applied towards the optimization of component shapes of a bistable MEMS switch. Small modifications in component shapes lead to a [...]

Actuation for Probe-Based Mass Data Storage

Alfaro J.F., Fedder G.K., Carnegie Mellon University, US

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response [...]

Static Equivalent Circuit Model for a Capacitive MEMS RF Switch

Tinttunen T., Veijola T., Nieminen H., Ermolov V., Ryhanen T., Helsinki University of Technology, FI

A simulation model for static analysis of a doubly supported capacitive MEMS RF switch has been constructed using electrical equivalencies. Energy-conserving large-displacement macro models for beam deflection, gap capacitance, electrostatic force, and mechanical contact are [...]

Nonlinear Analytical Reduced-Order Models for MEMS

Westby E.R., Fjeldly T.A., Norwegian University of Science and Technology, NO

We present a method for constructing a nonlinear, analytical, reduced-order model for MEMS-structures. The method is based on the center manifold approach for describing nonlinear modes of mechanical systems, in combination with techniques for predicting [...]

Modeling and Simulation for MEMS Design, Industrial Requirements

Neul R., Robert Bosch GmbH, DE

The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, [...]

RESCUER – the New and Effective Tool for Automatic Models Reduction – Application for Electro-Thermal Problems

Napieralski A., Zubert M., Napieralska M., Technical University of Lódz Al, PL

This paper presents some methods of thermal model reduction and translation into hardware description languages or other ones. The very effective model reduction is achieved owing to the application of higher order approximation and joint [...]

A 2D Visualization Tool for SUMMiT V Designs

Yarberry V.R., Jorgensen C.R., Sandia National Laboratories, US

This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by [...]

A 3D Geometry Modeler for the SUMMiT V MEMS Designer

Jorgensen C.R., Yarberry V.R., Sandia National Laboratories, US

This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline [...]

Diffusion Induced Stresses in Microstructures of MEMS

Yang F., University of Rochester, US

The diffusion-induced stresses in silicon wafers were studied. The effect of local electric field on dopant diffusion was considered in the diffusion equation. Only one-dimension problem with a constant surface dopant concentration was investigated. The [...]

3-D Computational Modeling of RF MEMS Switches

Espinosa H.D., Fischer M., Zhu Y., Lee S., Northwestern University, US

Young's modulus and residual stress state of freestanding thin membranes are characterized in this work by means of wafer level experimental techniques. RF MEMS Switches manufactured by Raytheon Systems Co. are investigated using a new [...]