Modeling and Simulation for MEMS Design, Industrial Requirements


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The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, which particularly use modeling and simulation techniques. The objectives of these methods are to optimize the function of the devices and to minimize development time and cost by avoiding unnecessary design cycles and foundry runs. Bosch is using MEMS mostly in the field of automotive sensors, which already experiences a notable growth rate. It is estimated that this growth will go on in the future [2,14]. Therefore efficiency of the development process is quite an important issue.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 6 - 9
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-7-1