MEMS – Page 14 – TechConnect Briefs

An implantable Drug Delivery Device based on MEMS

Elman N.M., Ho Duc H-L, Cima M.J., Massachusetts Institute of Technology, US

An implantable biochip based on MEMS (Micro-Electro-Mechanical-Systems) was developed to treat hemorrhagic shock in the battlefied. We discuss the design, fabrication, and testing of the device. In addition, we describe an animal model validating the [...]

Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world

Best K., Raval P., Kappel N., Yang C., Wang M., Jeewakhan N., Prejda M., Kassekert K., Moore M., ASML USA, Inc - Special Applications, US

In the MEMS and MOEMS product world, manufacturer of display/micro-devices requires bonding of two wafers. The front side pattern of the top wafer needs to be aligned with aggressive overlay requirement with the remaining portion [...]

Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch

Wang W., Popuri R., Onishi S., Bumgarner J., Langebrake L., University of South Florida, US

This paper presents the results of finite element analysis (FEA) modeling and simulation including thermal-electric-structural multiphysics contact phenomenon for a MEMS thermal-mechanical DC switch. The parametric model can be used for design optimizations.The switch consists [...]

Numerical Capacitance Calculation for Mems Pressure Sensor by Method of Moments

Li P., Weber R.J., Iowa State University, US

MEMS-based capacitive pressure sensors have been widely used in many engineering applications. The design of a MEMS capacitance pressure sensor presents a number of challenges, one of which is the calculation of sensor capacitance and [...]

Stability of micro and nano devices actuated by Casimir forces

Hernández J., Esquivel-Sirvent R., Instituto de Fisica, UNAM, MX

The effect of the Casimir force in micro and nano electromechanical systems (MEMS/NEMS) is examined taking fully into account the dielectric properties of the materials as well as the finite thickness of movable elements in [...]

Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

Stoffels S., Fernández L.J., Puers R., Tilmans H.A.C., IMEC, BE

Nowadays, electrostatically driven high frequency micromechanical resonators are being developed in which the gap spacing is minimized in order to achieve sufficiently high electromechanical coupling. Typical gap spacings for resonators operated close to a GHz [...]

Silicon Carbide Micro/Nano Systems for Harsh Environment and Demanding Applications

Mehregany M., Fu X-A, Chen L., Case Western Reserve Univesity, US

Micro/nano systems enable the development of smart products and systems by augmenting the computational ability of microelectronics with the perception and control capabilities of sensors and actuators. Micro/nano systems are also known as micro- and [...]

Validation for Micro- and Nano-Sensors

Henry M., Oxford University, UK

The rapid development of sensor and processing technologies is offering many opportunities for embedding new functionality within sensing devices. One important area is the development of diagnostics. While the generation of diagnostic error codes is [...]

Bridge Local Scour Monitoring System Using MEMS Sensor Zigbee Network

Lin Y-B, Lee C-C, Chen J-C, Chang K-C, Lai J-S, National Center for Research on Earthquake Engineering, TW

Bridges subject to periods of flood/high flow require monitoring during those times in order to protect the traveling public. These wireless MEMS scour-monitoring system can measure both the processes of scouring/deposition and the variations of [...]

A Multi-Purpose Optical MEMS Sensor for Harsh Environments

Nieva P., McGruer N., Adams G., University of Waterloo, CA

This paper presents the development and experimental analysis of a new multi-purpose optical MEMS (micro-electro-mechanical system) sensor for harsh environments. The sensor can be used as a displacement sensor, accelerometer, seismometer, and with some minor [...]