Stability of micro and nano devices actuated by Casimir forces

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The effect of the Casimir force in micro and nano electromechanical systems (MEMS/NEMS) is examined taking fully into account the dielectric properties of the materials as well as the finite thickness of movable elements in micro and nano systems. The
resulting equations are exact, and from the bifurcation diagrams the critical separation before jump-to-contact is determined. It is shown how the critical separation changes, for example, with the dielectric properties of the materials and how these systems can be rescaled based on the information from the bifurcation diagrams.

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Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2006 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: May 7, 2006
Pages: 523 - 525
Industry sector: Sensors, MEMS, Electronics
Topics: Informatics, Modeling & Simulation
ISBN: 0-9767985-8-1