FEM – TechConnect Briefs

Strain gradients in poly-SiGe nanocantilevers: experimental and finite element modeling studies

Asafa T.B., Ladoke Akintola University of Technology, NG

One of the fundamental structural requirements for successful performance of N/MEM devices such as nanoswitches, nanoresonators and biosensors is low strain gradient. Excessive strain gradient leads to unwanted deflection, which consequently alters the dynamic and [...]

FEM study of a 3-axis thermal accelerometer based on free convection in a microcavity

Nguyen H.B., Mailly F., Latorre L., Nouet P., University Montpellier 2 / CNRS - LIRMM, FR

Thermal convective accelerometers are based on heat transfer in a sealed cavity filled with a fluid. The principle was patented in the 40’s and the first implementations on silicon, obtained with bulk micromachining, were reported [...]

Finite Element Modeling and Simulation of Piezoelectric Energy Harvesters Fabricated in CMOS Technology

Mok A., Tigli O., University of Miami, US

Here we present a micron scale piezoelectric energy harvester fabricated in a commercial Complementary Metal Oxide Semiconductor (CMOS) technology. It is a trilayer cantilever model clamped on one end. The dimensions of this cantilever are [...]

Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

Nigro S., Pagnotta L., Pantano M.-F., Università della Calabria, IT

In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure [...]

Finite Element Modeling and Analysis of CMOS-SAW Sensors

Tigli O., Zaghloul M.E., Washington State University Vancouver, US

Finite element (FE) modeling and performance analysis of Surface Acoustic Wave (SAW) devices that are developed in CMOS (Complementary Metal Oxide Semiconductor) technology are presented. CMOS-SAW devices were designed, fabricated and characterized as a biosensor [...]

Finite Element Method and Genetic Algorithm for Analysis MEMS

Ortiz V.H., Chairez I., Biochip Bubbles, MX

This paper presents an analysis of the finite element method (FEM) and genetic algorithms for the analysis of MEMS and BIOMEMS design. The finite element method is the method used for the computational analysis of [...]

Towards an efficient multidisciplinary system-level framework for designing and modeling complex engineered microsystems

Clark J.V., Zeng Y., Jha P., Purdue University, US

We present advances in designing and modeling complex microsystems at the network/system-level. For design, we develop a graphical user interface that allows users to quickly configure complex systems in 3D using a computer mouse or [...]

Linear scaling techniques for first-principle calculations of large nanowire devices

Zhang D., Polizzi E., University of Massachusetts, FR

This paper aims to provide a sound basis to face the challenges in large scale atomistic simulations for applications ranging from material sciences and chemistry to nanoelectronics and bio-nanotechnology. In nanoelectronics, large scale ’ab-initio’ simulations [...]

Investigation of Carbon Nanotube Mechanical Properties Using Atomistic-Continuum Mechanics Method

Wu C-J, Chou C.Y., Han C-N, Chiang K.N., Advanced Microsystem Packaging and Nano-Mechanics Research Laboratory, National Tsing Hua University, TW

This paper utilizes atomistic-continuum mechanics method (ACM) to investigate the mechanical properties of single-walled carbon nanotubes (SWCNTs). Fundamental to the proposed concept is the perception that a carbon nanotube is a geometrical frame-like structure, and [...]

Finite Element Modeling of Electro-Mechanical Coupling in Capacitive Micro-Systems

Rochus V., Rixen D.J., Golinval J.-C., University of Liege, BE

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid [...]