Numerical modeling of squeeze-film damping in micro-mirrors including rarefaction effects

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In this work, we use a commercial finite element software, Comsol Multiphsics to solve some squeeze-film damping problems, which were experimentally investigated in the literature. They involve rotational motion at both high and low pressure regime. Finally, we discuss our results, which show good agreement with the corresponding experimental data.

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Journal: TechConnect Briefs
Volume: 2, Nanotechnology 2012: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational (Volume 2)
Published: June 18, 2012
Pages: 333 - 336
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 978-1-4665-6275-2