Intelligent Digital 3-Axis IMU for Automotive and Robotic Applications

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This paper presents the intelligent digital 3-axis IMU (inertial measurement unit) system. The MEMS accelerometer and gyroscope sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing cores accomplish the [...]

The Modeling and Characterization of Nano-Scale MOSFET Resistance

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It has been reported that both the shallow junction and the heavily doped extension as the methods to minimize the off-current and to stabilize the on-current of the sub-90nm scaled device, can solve the short-channel [...]