Intelligent Digital 3-Axis IMU for Automotive and Robotic Applications
Cho D-I, Choi B-D, Ko H., Lee A., Lee S-C, Lee S., Lim G., Lww S.C., Park S., Park Y., Song T., Yoo K., Seoul National University, KR
This paper presents the intelligent digital 3-axis IMU (inertial measurement unit) system. The MEMS accelerometer and gyroscope sensing cores are fabricated by using the SBM (Sacrificial Bulk Micromachining) process. The fabricated sensing cores accomplish the [...]