FR – Page 30 – TechConnect Briefs

Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation

Scheiblin P., Roger F., Poncet D., Laviron C., Holliger P., Laugier F., Guichard E., Caire J.P., LETI, FR

In this work, we propose calibrated models for predictive simulation of low energy Arsenic, Boron and BF2 ion implantation in the suitable range for sub-100nm CMOS technology. The International Technology Roadmap for Semiconductors (ed. 1999) [...]

Simulation and Characterization of High Q Microresonators Fabricated by UV – LIGA

Basrour S., Majjad H., Coudevylle J.R., Coudevylle J.R., de Labachèlerie M., CNRS, FR

This paper is devoted to a study on a new metallic microresonator realized by UV-LIGA technique. This device is excited electrostatically and takes advantage of the contour modes or Lamé-modes of the structure. Design methods [...]

Numerical Modeling of Magnetic Field Flow Fractionation in Microchannels: A Two-fold Approach Using Particle Trajectories and Concentration

Berthier J., Pham P., Massé P., LETI, FR

Submicronic paramagnetic particles are currently used for biological applications like medical diagnostic [1]. Recently modeling of displacement of such particles has seen new developments like the calculation of the trajectory of a particle [2], or [...]

Behavioral Models and Specific Design Tool for New Power Integrated Devices

Bordingnon T., Sanchez J.-L., Austin P., Houdbert V., LAAS/CNRS, FR

The developments of power systems require the use of specific functions offering a higher performance while being more compact and more reliable than existing discrete functions. To facilitate the design of these new functions,based on [...]

Analysis of an Electrostatic Microactuator with the Help of Matlab/Simulink: Transient and Frequency Characteristics

, ELMI, FR

The article is focused on the development of a numeric simulator dedicated to the electrostatic microactuator. It's based on the use of Simulink (Matlab „). The electrostatic microactuator is regard as a model <> associated [...]

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]

An Improved BDJ Photodetector Physical Model Implemented Under SPICE

Alexandre A., BenChouikha M., Sedjil M., Alquié G., Université Pierre et Marie Curie, FR

The physical model of the BDJ photo-detector is evaluated by comparing experimental results with simulations. The model is then improved using a parameter extraction method and by calculating the oxide layer effects. Finally the result [...]

On 2D/3D Numerical Oxidation Modeling: Calibration and Investigation of Silicon Crystal Orientation Effect on Stresses in Shallow Trench Isolations

Hoffmann T., Dombrowski K.F., Senez V., IEMN-ISEN, UMR CNRS, FR

Shallow trench isolations (STI) process needs careful optimization of thermal annealings in order to minimize leakage currents which may result from excessive mechanical stresses. Due to its intrinsic three-dimensional structure, conventional 2D process simulator is [...]

Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror

Camon H., Larnaudie F., Rivoirard F., Jammes B., LAAS/CNRS, FR

This paper is devoted to the study of the static and dynamic behavior of a 1D torsion single crystal silicon micro mirror. Our aim is to develop a parametric model allowing the use of single [...]

Modeling and Design Optimization of a CMOS Compatible MEMS

Latorre L., Bertrand Y., Hazard P., Pressecq F., Nouet P., LIRMM-CNRS, FR

Silicon etching at low temperature offers the possibility of manufacturing monolithic sensors with associated electronics. For a given technology, the so-called FSBM, we have established a set of relations to describe the mechanical behavior of [...]