A new integration concept for silicon devices to ceramic substrates based on a new bonding technique between nano-scaled, modified Black Silicon and an adapted, unfired LTCC substrate is presented. The novel technique enables to combine [...]
, Becker K.-F.
, Bauer J.
, Hausel F.
, Pahl B.
, Wittler O.
, Mrossko R.
, Jung E.
, Ostmann A.
, Koch M.
, Bader V.
, Minge C.
, Aschenbrenner R.
, Reichl H.
, Technical University Berlin, DE
As the development of microelectronics is still driving towards further miniaturization new materials, processes and technologies are crucial for the realization of future cost effective microsystems and components. These future systems will not only consist [...]
Individual submicron particles produced by non-lithographic techniques can be attractive for future microelectronic applications. Their touchless manipulation is a necessary prerequisite to use them, since they are too small to be handled via Pick&Place. We [...]
This paper describes a front venting MEMS pressure sensing array, fabricated through the MEMSCAP PolyMUMPS process. The microphone array will be used to analyze the turbulent boundary layer (TBL) of an airplane fuselage in wind [...]
A process for fabricating sub-cubic millimeter, fully autonomous micro-robots is presented. Details of the process flow and intial prototype structures are demonstrated. In addition, the design of an electrostatic actuator array for moving the robot [...]
There are design and realization of a sensor system for vertical velocity measurement using pressure sensor in the paper. Problem of nonlinearity due to the exponential function of air pressure versus altitude is discussed in [...]
The main factor that determines the cost of vibration-based condition monitoring system of large rotating machines is the unitary price of the piezoelectric sensors, commonly used in such devices. Silicon microaccelerometers can be considered as [...]
This paper will deal with two core questions: 1. The evolution of Microsystems towards Smart Systems. 2. How will the development of Smart Systems influence the future of Microsystems Technologies (MST)? Overall from the development [...]
We present design, fabrication, and characterization of an extremely small (20x14 µm) movable 3D micro vehicle. The micro mobile was fabricated using a combination of focused-ion-beam (FIB) for micro/nano parts production, atomic layer deposition (ALD) [...]
The US Army is transforming into a lighter yet more lethal “objective force”, all while fighting wars in the Middle East. Therefore, advanced technologies and materials are being developed and integrated into current and future [...]
This paper examines and demonstrates a possible mechanism of sensing weak magnetic fields in biosystems.
This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]
Crack and void free polycrystalline Lead Zirconate Titanate (PZT) films in the range of 5 µm to 10 µm have been successfully deposited on silicon substrates using a novel high rate gas flow sputtering process. [...]
Surface acoustic wave (SAW) devices have been widely implemented for wireless communications. Recently, SAW devices continue the upward trend in frequency for higher functionality. Nanoimpirnt can adequately offer mass production technique on interdigital transducer (IDT) [...]
A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization [...]
Terahertz imaging finds more and more applications in homeland security, medical, and life sciences applications. While THz sources and detection systems are gaining ground, the ability of electronics conversion systems to keep up with the [...]
The mammalian cochlea is an organ that performs the conversion of the incoming mechanical energy into electrical signals in the auditory nerve fibers. Current cochlear Implants have been developed in an effort to restore sensorineural [...]
Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2008: Microsystems, Photonics, Sensors, Fluidics, Modeling, and Simulation – Technical Proceedings of the 2008 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: June 1, 2008
Industry sector: Sensors, MEMS, Electronics
Topic: Sensors - Chemical, Physical & Bio