Papers:
Optimization of Integrated Magnetic Field Sensors
We present an optimization strategy for the offset reduction of integrated magnetic field sensors with simultaneous maximization of sensitivity. We use the topology optimization method to automatically find a design with maximal sensitivity for given [...]
A New Material Interpolation Scheme for the Topology Optimization of Thermally Actuated Compliant Micromechanisms
Thermally actuated compliant micromechanisms are selectively heated elastic continua that take advantage of nonuniform thermal expansion and mechanical leveraging to amplify displacements and forces. These can be designed systematically, as shown in the earlier work [...]
Robust Mask-Layout Synthesis for MEMS
A method for automated mask-layout and process synthesis for MEMS using Genetic Algorithms was proposed by Ma and Antonsson [5]. For a given desired device shape, and several fabrication process choices, this synthesis method will [...]
Designing Efficient Computer Experiments for Metamodel Generation
We demonstrate the relative merits of IZ-optimal designs for computer experiments relative to Latin hypercube designs, using two examples, both in two factors and eleven points, one a simple function from Welch et al. [1] [...]
Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS
Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K., University of Pennsylvania, 220 S. 33rd Street, US
A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from [...]
Noise Modeling Methodology for Full-System Inertial Microsensor Codesign
Methos for incorporation noise models into full-system inertial microsensor simulation are presented. Thermal motion of the proof mass and flicker noise in the interface circuit exhibit essential behaviore that must be included in sensor design. [...]
Computer-Aided Kinematic Design of a Torsional Ratcheting Actuator
We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation [...]
Design of Reconfigurable Composite Microsystems Based on Hardware/Software Co-design Principles
Custom microsystems are expensive, inflexible, and unsuitable for high-volume production. We address this problem by leveraging hardware/software co-design principles to design reconfigurable composite microsystems. We partition the system design parameters into nonreconfigurable and reconfigurable categories. [...]
Simulation and Optimum Design of Finline/Slotted Line Millimeter Wave Antenna
Simulations are carried out using XFDTD software to determine the set of input values for several parameters of the fin line antenna, to give an optimized radiation performance in the principal planes. A further modification [...]
Structural Design of Micro Electrostatic Actuator for Optical Memory Using Design Windows Searching Method
For satisfactory design of micromachines, this paper describes a search method for a multi-dimensional design window (DW), which is defined as an area of satisfactory solutions in a feasible design parameter space. The method consists [...]
Microsystem Model Evaluation Using Optimization Strategies
This paper presents an automatic approach for evaluating behavioral models of micro systems' components. Optimization methods are applied aiming at the specification of a model's scope of application. The method is presented by evaluating a [...]
A New 3D Analytical Design Model of an Electrostatic Micromotor Using Multi-objective Approach
This paper presents a new design technique for finding the optimal structures of small size variable capacitance (VC) side-drive micromotors, based on a new 3D analytical micromotor design model. Two objective functions in mutual contrast, [...]
Statistical Optimal Design of Microelectromechanical Systems (MEMS)
A three-step technique for MEMS quality optimization is demonstrated. It exploits the relative merits of its constituent optimization components. Analog Devices' ADXL50 accelerometer was the test device with microstructure dimen-sions serving as design parameters. Manufacturing [...]
A Method for Determining the Dependence of Integrated Circuit Performance on Silicon Process, Device and Circuit Parameters
The goal of this project is to develop a structured methodology for achieving a design of a block of circuit in an IC which is more compliant to the specification using a multiple simulation approach. [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4