This paper presents an automatic approach for evaluating behavioral models of micro systems’ components. Optimization methods are applied aiming at the specification of a model’s scope of application. The method is presented by evaluating a behavioral model of a capacitive pressure sensor. The model incorporates a new approach for the calculation of the sensor’s bending line. It considers small as well as large deflections.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 161 - 164
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems