Noise Modeling Methodology for Full-System Inertial Microsensor Codesign

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Methos for incorporation noise models into full-system inertial microsensor simulation are presented. Thermal motion of the proof mass and flicker noise in the interface circuit exhibit essential behaviore that must be included in sensor design. While typically described in terms of frequency spectra, these noise sources must be developed for transient simulation-inertial microsensors display nonlinarity and time dependence that invalidates any small-signal frequency domain simulation. THe methos for thermal noise modeling also allow transfer function data to be obtained. Results are given for flicker noise characterization and a voltage-controlled oscillator, including both magnitude and phase information. The noise modeling methods complemenet a complete inertial microsensor simulation model that has been developed in the SPICE circuit simulator environment.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 140 - 143
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4